Semiconductor - Plasma Etching, Ozone Ashers, RIE for sale at Equip X

Advanced Filters

Category

Subcategory

Used Henniker HPT200 Plasma System with single gas MFC and 150mm ID chamber

Henniker HPT200 Plasma System with single gas MFC and 150mm ID chamber

Used March CS1701 Single wafer Reactive Ion Etcher, New Seren 600w 13.5mhz Rf, Fomblin pump, Chiller

March CS1701 Single wafer Reactive Ion Etcher, New Seren 600w 13.5mhz Rf, Fomblin pump, Chiller

Used Diener FEMTO SRS Plasma asher (2014) with Pfeiffer DUO 1.7cfm vacuum pump

Diener FEMTO SRS Plasma asher (2014) with Pfeiffer DUO 1.7cfm vacuum pump

Used Plasmatherm SLR720 shuttle lock RIE for compound semiconductor etching

Plasmatherm SLR720 shuttle lock RIE for compound semiconductor etching

Used PSM inline atmospheric plasma system- Demo unit never installed

PSM inline atmospheric plasma system- Demo unit never installed

Used Surfx Atomflo 250 atmospheric plasma surface treatment

Surfx Atomflo 250 atmospheric plasma surface treatment

Used Atmospheric Process Plasma (APP) System with RFPT 600W 13.86mhz Rf power supply, and DX-VV auto match network

Atmospheric Process Plasma (APP) System with RFPT 600W 13.86mhz Rf power supply, and DX-VV auto match network

Used PSM atmospheric plasma

PSM atmospheric plasma

Used Tepla 600-AL (autoload) plasma asher for 200mm wafers with ENI 13.56mHz Rf generator

Tepla 600-AL (autoload) plasma asher for 200mm wafers with ENI 13.56mHz Rf generator

Used PVA Tepla 9204 (FORMERLY GASONICS) plasma asher with 4 gas channels

PVA Tepla 9204 (FORMERLY GASONICS) plasma asher with 4 gas channels

Used Glen Technologies (Yield Engineering) R3A 500W low frequency Plasma Asher

Glen Technologies (Yield Engineering) R3A 500W low frequency Plasma Asher

Used Gasonics 9104 plasma asher (never installed with new control box)

Gasonics 9104 plasma asher (never installed with new control box)

Used Tokyo Electron TEL 7500 spare sender arm assy-SPARE NEW UNUSED

Tokyo Electron TEL 7500 spare sender arm assy-SPARE NEW UNUSED

Used PlasmaFinish V55-G Microwave ashing system

PlasmaFinish V55-G Microwave ashing system

Used March PX1000 Plasma Asher with ENI 1200W RF generator

March PX1000 Plasma Asher with ENI 1200W RF generator

Used PlasmaFinish V55-G plasma system

PlasmaFinish V55-G plasma system

Used Samco UV-660 Ozone Stripper

Samco UV-660 Ozone Stripper

Used Yield Engineering R3 Plasma Cleaner with 500w power supply @ 50Khz

Yield Engineering R3 Plasma Cleaner with 500w power supply @ 50Khz