PVA Tepla 9204 (FORMERLY GASONICS) plasma asher with 4 gas channels

208v, 3 phase, 50/60hz, 20 amps

Exceptional condition: Quartz barrel shows no sign of etching or use

12"(dia) x 20"(D) quartz barrel

Seren 600 watt Rf power supply 13.56mhz

External wall mounted power distribution and contactor box with EFO

serial no. 2049