Diener FEMTO SRS Plasma asher (2014) with Pfeiffer DUO 1.7cfm vacuum pump

Generator: 13,56 MHz / 0-50 W

Vacuum pump: Pfeiffer DUO

Controls:   Type A Semi-automatic

pump, gas flow, plasma process, venting have to be initiated manually

Selectable parameters: process time, power, type of gas, gas flow

Gas Supply: single channel flowmeter with needle valve

Vacuum chamber:  Stainless steel round with cover: Ø 100 mm, D 278 mm

Tray: Aluminum flat 90x255mm

Electrode: standard round

Power req: 110v/230v
serial no. 14348
Manufacture date 2014
includes 110v to 230v transformer