Yield Engineering R3 Plasma Cleaner with 500w power supply @ 50Khz

Plasma cleaner for hybrid devices

microprocessor control with multi program capability

down stream design for better uniformity

2 pull out shelves each 12.75"x12.75"

three gas inputs each with needle valve flow control

Comdel 500w CLF500H 50khz power supply and matching network

Alcatel 2010C2 7cfm vacuum pump

110v 16A

serial no. 88440

Power req 115vac