March CS1701 Single wafer Reactive Ion Etcher, ENI 600w 13.56mhz Rf power supply, vacuum pump, Chiller
March CS1701 Single wafer Reactive Ion Etcher, ENI 600w 13.56mhz Rf power supply, vacuum pump, Chiller
$19,500 (USD)
or
Call (408) 209-9278
Description
ENI 600w 13.56mhz Rf generator
Chamber configured for 75-100mm wafer
2 gas channel MFC's: 100 SCCM, 100 SCCM
MFC's calibrated for N2
Affinity chiller
Vacuum pump- Adixen 2010C2 Fomblin prepped or equivalent
Auto tuning
Power requirements 220vac, 50/60hz, 1 phase
manufacture date 01-2012
see PDF link for full specifications below
Specifications
| Stock Number | 5062 |
| Sort | 0 |