Samco UV-660 Ozone Stripper

UV ozone stripper/cleaner for removing organic materials ie. solvent residues, photoresist, inks, or polyimides.

Substrates are processed using UV light, ozone, and heat.

Tools can process 4 x 6" wafers or 1 panel up to 470mm x 320mm.

Ozone decomposition scrubber, digital process timer and temperature controller, 115v.

Operating and installation manuals included with full schematics