2018 Leica EM ACE 600 dual e-Beam sources with Meissner trap (Cryo pump) and motorized stage

Dual e-beam coater - Basic unit consisting of:

• Metal vacuum chamber 200 mm 150 mm 195 mm

• Integrated oil free pumping system with turbo pump and membrane (diaphragm) pump

• Integrated film thickness monitor (QSG-quartz crystal measurement) 0.1 nm accuracy. Includes 10 crystals

• Automated stage rotation room temperature

• LED vacuum chamber light

• Internal metal vacuum chamber shield, easily removable for cleaning

• Removable door with large exchangeable safety glass window

• Integrated power supply for e-beam evaporation

• Mains cable

• USB port for log file download, USB stick

• Two blind flanges for cryo upgrade option - Two e-beam heads

• Easy target exchange system.

• Easy reloading of target material

Meissner trap (cryo pump) for moisture removal incl. LN2 dewar

Two automated target shutters easily removable - Integrated touch screen for automated process programming and saving of log files - Triple safety system (door, cover and software sensors) Operating manual

Small cabinet of spare parts

Blind flange for dewar

Dewar flask for filling Meissner trap with LN2

Stage for SEM stubs (Hold 25 SEM stubs) pn 16771548

Stage for glass slides pn 16771547

1 pack gold crystals 6MHz for film thickness pn 16771531889

Special tool set to load and align e-beam evaporation source

Carbon rods

Tungsten filaments (Qty 14)

Carbon rods for platinum

Platinum inlets