Olympus MX61-F semiconductor inspection microscope configured for brightfield darkfield inspection of maximum 200mm wafers

Brightfield and darkfield inspection
reflected light observation
8"x8" manual XY stage
Binocular tilt viewing head with camera port UW 10x UW eyepieces

Brightfield Darkfield Objectives
5x Um Plan
10x UM Plan
20x UM Plan
50x M Plan
100x M Plan

optional:  DIC available
optional: LM Plan APO 150x