KLA Tencor P10 Surface Profiler

The KLA Tencor P10 is a manual-load stylus profiler primarily used for measuring surface characteristics like step height, roughness, and waviness in research and development or production environments. 

Key Specifications

Vertical Range 50 Å to 130 µm (standard)

Vertical Resolution Sub-angstrom resolution (as low as 0.5 Å)

Scan Length Up to 60 mm (full scan)

Stylus Force Range Programmable from 1 mg to 50 mg (With optional Microhead 0.05 mg to 50 mg)

Max Substrate Size Up to 8 inches (200 mm) diameter

Stage Motorized X-Y stage with manual Z control

Analysis Parameters Step height, roughness, waviness, slope, area, etc.

Operating System Windows 3.1

Features

• Closed-loop sensor design: Ensures constant force application during scanning, allowing for measurement on a variety of surfaces, including some softer materials like photoresist.
• Data Analysis: Features include fitting and leveling scan data, automated edge or apex detection for features, and 3D rendering of scan data.
• Optics: Equipped with top-view and side-view optics for sample alignment and imaging. 
• Includes VLSI 938nm (9380A) Step height standard and Stylus Alignment Tool
• Includes User and Maintenance manuals

KLA-Tencor P10 can profile a variety of materials including:

- Semiconductor wafers

- Thin-film heads

- Precision-machined and polished surfaces

- Ceramics for micro-electronics

- Glass for flat panel displays

- Optical surfaces