KLA Tencor P10 Surface Profiler

The KLA-Tencor P-10 is a stylus-based surface profiler for measuring step height, roughness, and waviness, offering high vertical resolution (down to <0.1Å with some heads) for various materials, handling wafers up to 200mm (8-inch), and measuring features from nanometers to hundreds of microns, with features like 2D/3D analysis, automated defect review (optional), and advanced software for yield analysis. 

Key Specifications & Capabilities:

• Measurement Type: Stylus-based, direct measurement of step height, roughness (Ra, Rq, Rt, etc.), and waviness.
• Vertical Range: Varies by head, but can reach 130µm (MicroHead II) with <0.1Å resolution or 300µm with 0.5Å resolution.
• Sample Size: Handles up to 200mm (8-inch) wafers, with capacity for larger samples (up to 350mm wide/14 in. at some facilities).
• Resolution: Excellent vertical resolution (e.g., <0.1Å), limited horizontally by stylus radius.
• Software: Windows-3.1 based, offers 2D/3D analysis, automated data analysis, and yield management.
• Applications: Thin-film thickness, etch depth, surface texture, defect analysis, process control. 

Key Features:

• Low-Force Measurement: Optional MicroHead II for soft materials (photoresist, gold).
• Automated Analysis: Detects feature edges, calculates averages, offers statistical analysis.
• Versatility: Measures on glass, ceramics, wafers, disks, etc..
• Integration: Can integrate with factory automation and robotic systems