Nikon MS-550 Large Panel Inspection Microscope

Large panel inspection tool

transmitted and reflected light observation

manual stage with XY travel 56cm (22") X x 48.5cm (19") Y

maximum 23"x23" substrate

Windows PC

Media Cybernetics Image Pro Plus acquisition and measurement software with USB dongle

17" LCD monitor

Hitachi KP-D208U color camera

250w fiber optic illuminator

Nikon long working distance brightfield and darkfield CFI LU Plan BD 5x, 10x, 20x, 50x, 100x objectives

L-NU5A motorized nosepiece

L-NCNT controller

trinocular viewing head with 10x/22 eyepieces