Glen Technologies (Yield Engineering) R3A 500W low frequency Plasma Asher

PLC controlled and offers real-time plain English readout of system operating parameters together with remedial action in the event of an abort.

3 plasma modes:

Active Plasma for routine cleaning of sample surfaces

RIE Plasma for aggressive cleaning of non ESD sensitive samples

Downstream, Electron-Free Plasma for cleaning sensitive electronic components 

The Glen R3A Plasma Cleaner can be operated in a single or dual plasma sequence 

Advanced Energy PE-1000 AC Plasma Power Source; 500w @ 40khz

Electrodes: (2) 14 x 14-inch electrode sets; capable of up to 8 sample trays

Dual gas inputs with needle valves

PLC-controlled

Computer Interface: RS 232

Power Requirements: 110Volt

Full Load Current Rating: 13 Amp

Vacuum Pump not included