Kurt Lesker SPECTROS deposition system with 4-pocket E-beam gun, 3 Thermal sources and load lock

Date of manufacture 12/2008, Order no. 44195, serial no. TUR104

Power requirements: 230v, 32 amps, 1 phase, 50/60hz

SIGMA software running on Windows XP platform

Edwards XDS10 scroll pump

Leybold ITR90 vacuum gauge

CTI 8 cryopump with 8200 cryo compressor on main chamber

Load lock with Pfeiffer TMH 521P turbo pump

3 Thermal evaporation sources with shutters

Quartz crystal film thickness monitors (3)

E-beam 4 pocket gun - evaporation source

100mm rotating substrate holder

Previous usage: metal evaporation

Automatic Organic material evaporation with Sigma software

Price listed is "as is"

EquipX can also quote the system refurbished for $85,000.

The Kurt J. Lesker SPECTROS™ series is a specialized platform for thin-film deposition, primarily optimized for organic material deposition and metallization. It is a "workhorse" in research and pilot production for technologies like Organic Light Emitting Devices (OLEDs), organic photovoltaics (OPVs), and organic electronics. 

Kurt J. Lesker

 +4

Key System Configurations

The SPECTROS platform is modular and available in several sizes to accommodate different substrate requirements: 

• Mini SPECTROS™: Optimized for substrates up to 100mm x 100mm. It features a technically superior chamber design with improved base pressures and faster pump-down times.
• SPECTROS™ 150: Designed for substrates up to 150mm x 150mm.
• Super-SPECTROS™ 200: The largest variant, handling substrates up to 200mm x 200mm. It can host up to 12 Low Temperature Evaporator (LTE) sources. 

Core Technical Capabilities

• Organic Deposition (LTE): Uses Low Temperature Evaporators (LTE) to deposit volatile organic materials at temperatures typically ranging from 50°C to 600°C.
• Multi-Technique Support: Can be configured with LTE sources, thermal evaporation sources, TORUS® magnetron sputtering, and electron beam evaporation.
• Glovebox Integration: Frequently integrated with a glovebox to maintain an inert environment, protecting sensitive organic compounds from atmospheric moisture and oxygen.
• Advanced Control: Managed by the KJLC eKLipse™ software, which allows for precise recipe-based automation and real-time thread operation.
• Performance: Features high rate control resolution (as low as 0.05Å/s) and host-to-dopant ratios as high as 1000:1. 
• Kurt J. Lesker
•  +5

Common Applications

• OLED/PLED Fabrication: Multi-layer deposition for displays and lighting.
• Perovskite Research: Thin films for next-generation photovoltaics.
• Flexible Electronics: Compatible with a wide range of flexible substrates when using specific modules