Kurt Lesker SPECTROS deposition system with 4-pocket E-beam gun, 3 Thermal sources and load lock

Date of manufacture 12/2008, Order no. 44195, serial no. TUR104
Power requirements: 230v, 32 amps, 1 phase, 50/60hz
SIGMA software running on Windows XP platform
Edwards XDS10 scroll pump
leybold ITR90 vacuum gauge
CTI 8 cryopump with 8200 cryo compressor on main chamber
Load lock with Pfeiffer TMH 521P turbo pump
3 Thermal evaporation sources with shutters
Quartz crystal film thickness monitors (3)
E-beam 4 pocket gun - evaporation source
100mm rotating substrate holder
Previous usage: gold and silver evaporation
Automatic Organic material evaporation with Sigma software

Price listed is "as is"
EquipX can also quote the system refurbished for $85,000.