Specialty Coating Systems Spincoat G3P-8 photoresist coater with 8 inch diameter bowl

Specialty Coating Systems Spincoat G3P-8 photoresist coater with 8 inch diameter bowl

$4,450 (USD)

or
Call (408) 209-9278

Description

Manufacture 2010
sn 141739

System Features

  • Compact enclosure size
  • 8 inch bowl for maximum 6x6 substrate
  • Fast, simple programming by means of microprocessor-based control
  • Front flat panel LCD display and keypad
  • Close loop servomotor for precise speed regulation
  • Communication port for external control using optional PC interface software for programming, profile storage, PID, diagnostics, vacuum on/off, slow speed centering, and programmable house position.
  • Stores and executes up to 30 programs, with up to 20 steps each (unlimited w/ optional software)
  • Spin profiles adjustable in 1.0 rpm rotation increments, 0.1 second timing increments, and 1.0 second increments for dwell time.
  • Precise repeatability from cycle to cycle
  • Encoder allows vacuum chuck to be stopped at a Home position
  • Chemically resistant Teflon coated bowl with integral drain
  • Hinged, interlocking cover
  • Safety glass window

    • Specifications

    Bowl Diameter 8in
    Rotational Speed
    0-9,999 RPM

    Acceleration/Deceleration
    Ramp times from 0.1 to 25.5 seconds, in 0.1 second increments

    Dwell Time
    0 to 999 seconds in 1 second increments

    Dispense Time
    0 to 25.5 seconds in 0.1 second increments

    Power Input
    115/230 VAC, 50/60 Hz, 1Ø

    Vacuum Input
    Minimum 17 in Hg / 430 mm Hg, (~ -8.3 psig); Maximum 25 in Hg / 635 mm Hg (~ -12.3 psig); O.D. fitting: 0.25 in / 0.635 mm

    Purge Input
    0.55 CFM at 5 psi / 14.15 CLM at 0.35 kg/cm2 air or nitrogen (with optional internal vacuum: 2.2CFM, 60 psi)
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    Specifications

    Stock Number4547
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