CEE 300X coater for max 300mm wafers

For coating up to 300mm wafers or LCD squares up to 14x14

7" touch screen display Windows based PC control

0-6,000 RPM

vacuum and lid interlocks

200-240vac

Utilities: 200-240vac, 1"OD drain, 1.5" OD exhaust port, 20-25" Hg vacuum, 20-50cfm exhaust,

70psi Nitrogen or CDA for automated dispense

4 channel dispense pneumatic control box