Yield Engineering 450PB6-2P High temperature vacuum oven for polyimide, photoresist and epoxy curing

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 Max Capacity: 2 cassettes of 150mm Wafers  

- Temperature Range: 25C to 450C

- Multiple Program Temperature Controller

- 2 gas channels with mass flow controllers 

- Power: 220V, 25 Amps, 50/60 Hz 1 phase

_Leybold Sogevac SV40 vacuum pump or equivalent-serial no. 88546