March CS1701 Single wafer Reactive Ion Etcher, New Seren 600w 13.5mhz Rf, Fomblin pump, Chiller

RF-VII 600w 13.56mhz Rf generator (NEW)

Chamber configured for 75-100mm wafer

2 gas channel MFC's: 100 SCCM, 100 SCCM

All MFC's calibrated for N2 

Affinity chiller

Vacuum pump- Adixen 2010C2 Fomblin prepped

Auto tuning

Power requirements 220vac, 50/60hz, 1 phase

manufacture date 01-2012

see PDF link for full specifications below