Cascade Form Factor Elite 300 Semiautomatic prober with ERS 300mm temperature controlled wafer chuck and eVue digital microscope, and Nucleus software
Cascade Form Factor Elite 300 Semiautomatic prober with ERS 300mm temperature controlled wafer chuck and eVue digital microscope, and Nucleus software
$149,500 (USD)
or
Call (408) 209-9278
Description
300mm semiautomatic prober
Precision linear-motors/ air bearing stage
Sub-micron stepping with auto XYZ and theta correction
eVue 3 digital imaging system with enhanced optical visualization and remote control
Microchamber with EMI shieldon, light attenuation, and air-purge management
DUT sizes supported; shards or wafers from 50mm to 300mm
Internal pneumatic vibration dampening
Nucleus ver. 4.1 software running on Windows 7 PC
sn 729240602
ERS 300mm thermal chuck with Attoguard, air cooling and -60 to +300C range
Precision linear-motors/ air bearing stage
Sub-micron stepping with auto XYZ and theta correction
eVue 3 digital imaging system with enhanced optical visualization and remote control
Microchamber with EMI shieldon, light attenuation, and air-purge management
DUT sizes supported; shards or wafers from 50mm to 300mm
Internal pneumatic vibration dampening
Nucleus ver. 4.1 software running on Windows 7 PC
sn 729240602
ERS 300mm thermal chuck with Attoguard, air cooling and -60 to +300C range
Available upper temperature limits: +300°C
Coolant: Air
Chuck Temperature Display Resolution: 0.01°C
Smallest Temperature Selection Step: 0.1°C
Temperature accuracy: ±0.1 °C
Max. Voltage between Chuck Top and GND: 500 V DC (high voltage option up to 10 kV available)
Surface flatness and base parallelism: up to +300 °C < ±15µm
Temperature uniformity: 20 °C to +200 °C < ±0.5 °C > 200 °C < ±0.8 %
Electrical Isolation STD: > 1 T Ohm at +25 °C
Temperature sensor: Pt100 1/3DIN, 4-line wired
Chuck surface plating: Nickel
Interfaces: RS232C, Ethernet
Control method: Low noise DC/PID with Temperature Dynamic Control TDC
Heating rates for 300 mm system
+25 °C to +150 °C: 10 min
+25 °C to +200 °C: 15 min
+25 °C to +300 °C: 25 min
+25 °C to +200 °C: 15 min
+25 °C to +300 °C: 25 min
Cooling Rates for 300 mm system
+150 °C to +25 °C: 20 min
+200 °C to +25 °C: 25 min
+300 °C to +25 °C: 30 min
+200 °C to +25 °C: 25 min
+300 °C to +25 °C: 30 min
Specifications
| Stock Number | 5103 |
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