2018 NxQ Neutronix Quintel 9000 Roll to Roll Lithography System

NxQ 9000 R2R Roll-to-Roll proximity photolithography exposure system

Designed for noncontact exposure of photoresist-coated continuous metal web, the system includes an

enclosed exposure platform, mask/exposure stage, vacuum chuck

and alignment hardware, integrated controls, mobile operator

console, monitor, keyboard and stack-light status indicator.

Includes separate Northfield Automation unwind and rewind web-handling

modules with roll spindles, rollers, control enclosures,

emergency-stop controls and stack lights.

The original process specification was developed around 320 mm-wide ferritic

stainless-steel web, nominally 25-75 microns thick, in lengths from

50 to 200 m.

The signed purchase specification calls for a

mercury-lamp proximity-exposure platform using a tool-specific 1 or

2 kW lamp, with provisions for 365 nm i-line and 436 nm g-line

wavelength filters.

The specified operating concept includes edge

and pattern alignment, vacuum hold-down, stepped subfield

alignment, noncontact exposure, vacuum release, web indexing and

rewinding with interleave provisions. Original design targets included:

300 × 300 mm full exposure field or four stepped 150 × 150 mm

subfields

Exposure-dose range of 50-400 mJ/cm2 3.0-micron

line-and-space resolution with ±0.25-micron target tolerance

±2- micron layer-to-layer registration target 10-50 micron

Configurable mask-to-substrate proximity

Minimum specified throughput of 0.375 m/min

Web-speed selections including 0.2 and 0.5 m/min

These figures are original purchase-specification

requirements and are not a representation of present accuracy,

resolution, lamp condition, calibration or production performance.

The specification also describes an optional Keyence

ML-Z9500W/ML-Z9520W laser-ablation and scribing upgrade;

Main-system nameplate:

Neutronix-Quintel NxQ 9000 R2R, Serial

No. 802, 208 VAC, three-phase, 30 A, manufactured February 2018.

Northfield Automation unwind/rewind modules are name plated for

120 VAC, single-phase, 60 Hz