SSE Opticoat ST60+ large-format spin coating system

SSE/ Robotechnik OPTIcoat ST60+

Large-format spin coating system

designed for the controlled application of photoresist and other thin-film materials to wafers and substrates.

The enclosed, stand-alone system features an integrated process chamber,

Programmable controls,

Electrical: 208 VAC, three-phase,

N/PE, 50/60 Hz

Fuse rating: 3 × 16A;

Nitrogen supply: 2–3 bar

Compressed air: 8 bar

Vacuum: ?0.8 bar

Exhaust connections:

Includes the controller, workstation, process components and

accessories shown in the photographs.