Olympus MX61-F with AL120-L86 loader and shuttle stage for 150/200mm wafers

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Description

Brightfield and darkfield inspection

Olympus U-CA Magnification Changer

Tilt viewing head with camera port

5x/10x/20x/50x/100x objectives

Wafer shuttle stage

AL120-L68 wafer loader

Configured for 150mm or 200mm wafers

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Specifications

Stock Number6268
ManufacturerOlympus
ModelMX61-F with AL110-L8
Serial NumberA3C12008 (AL120), 7C25018 (MX61-F)