Olympus MX61-F with AL110-L8

Description

Brightfield and darkfield inspection

Tilt viewing head with camera port

5x/10x/20x/50x/100x objectives

Wafer shuttle stage

AL110-L8 wafer loader

Configured for 150mm or 200mm wafers

Specifications

Stock Number6268
ManufacturerOlympus
ModelMX61-F with AL110-L8