2024 KLA-Filmetrics Profilm 3D-200 Interferometric Optical Profiler

2024 KLA-Filmetrics Profilm 3D-200 Interferometric Optical Profiler

$59,000 (USD)

Description

Includes

4 position objective turret and autofocus

Motorized auto stage with 200mm x 200mm travel (8"x8")

Profilm data analysis and viewer software with stitching

5x Michelson interferometric objective lens

10x/20x/50x Mirau interferometric objective lenses

Dell 5040 Workstation with monitor and software

Step height calibration standard with 10um step


Specifications

Stock Number6215
ManufacturerKLA-Filmetrics
ModelProfilm 3D-200
Year2024
Serial Number20C009