2022 Yield Engineering Systems YES 450 PB8-2P-CP Polyimide Bake Oven with Oxygen Monitor and 3 MFC Gas inputs

YES -PB8-2P-CP

Interior chamber dims: 14.42"ID x 26.19"deep

Wafer Capacity: up to 50 200mm wafers/batch (2 25 wafer cassettes)

100 micron inlet for preheated N2 purge

Manual throttle valve assembly

Controller with color touch screen and PLC for 8 temperature profiles

Ambient to 450c

Light tower with "abort", "cycle complete", and "running" lights

EMO front and rear

208v, 3 phase, 50/60Hz, 40 amps

21 CFM Dry pump

O2 analyzer includes: Illinois Instruments 913 O2 analyzer with internal sample pump, RS232/485 com ports

3 Gas plumbing modification

3 Process gas inputs with MFC's

Stainless steel table with locking casters