Zeiss LM100 Inspection Microscope for wafers up to 450mm or flat panels up to 548mmx548mm with motorized stage, brightfield, darkfield, and Nomarski inspection

Zeiss inspection microscope for large wafers and panels with reflected and transmitted light

Brightfield, darkfield, Nomarski (DIC) inspection

Merzhauser motorized xy stage with 550mm x 550mm travel (21.6"x21.6")

Stage dimensions 575mm x 700mm.  Opening in stage 305mm x 445mm

Distance between granite supports 49 inches.

Axiotron 2 microscope configured for brightfield, darkfield, and DIC with motorized polarizer

Motorized nosepiece rotation with Epifluor HD DIC objectives 5/10/20/50/100x

6 place motorized nosepiece with Nomarski prisms for DIC

12v/100w lamphouse for reflected light

transmitted light source with Zeiss KL1500 fiber optic power supply