Suss RC8-MS3 Photoresist Spin Coater for max 200mm substrates

spin coater with GYRSET system for better uniformity and lower resin consumption

Quick exchange Gyrset

motorized and programmable dispense arm

max 200mm wafer or 6"x6" square substrate

stainless base cabinet

Maximum 5000 rpm/sec acceleration

motorized dispense arm

multiple dispense capability for up to 2 photoresist

Cybor 512 power supply with 505 controller (will control 1-2 pumps)

1 Cybor 5126C pump

resist nozzle autoclean

cartridge dispense

2nd Cybor pump add $3500.

Multiple chucks and Gyrsets available for different size substrates.  Please specify requirements.