Lasertec VL-2000 Confocal Microscope for CD measurement and surface profile

Lasertec VL-2000 Confocal Microscope for CD measurement and surface profile

$18,900 (USD)

or
Call (408) 209-9278

Description

408nm GaN (Gallium Nitride) blue laser confocal microscope for CD measurement and surface profiling

Semprex 200mm stage with linear encoders, digital display,  and optional paddle with theta rotation 

0.14u resolution

1/15th second scan speed

1ZC1 Z axis controller

Nikon microscope with (4) BD CF Plan BD DIC objectives: 5x, 10x, 20x, 50x

Optional: TMC vibration isolation platform

Blue laser confocal scanning microscope
VL2000D

Product outline

This is a monochromatic laser microscope using a blue laser diode (408nm), for its light source to meet the need for high-resolution microscopes in semiconductor and other industries where the scaling of microfabrication was in progress at an accelerated pace. It achieved 0.14µm resolution, dramatically higher than the previous models, by combining a newly designed optical system with a blue laser diode. Its maximum magnification was 7,200x on the monitor (with a 200x objective lens).

Main features

  • High-speed scan for real time observation
  • Improved observation performance for low reflectivity samples and slopes
  • High-precision measurement of line widths and heights
  • Laser scale for high-resolution, high-repeatability height measurement

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    Specifications

    Stock Number1780
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