Prior Scientific HR05/5 motorized 6x6 XY shuttle stage for Olympus wafer loader

Prior Scientific HR05/5 motorized 6x6 XY shuttle stage for Olympus wafer loader

$6,500 (USD)

or
Call (408) 209-9278

Description

H105 Motorized 6"x6" XY wafer shuttle stage configured to interface with Olympus wafer loader for 4"-6" wafers

Wafer may be scanned using joystick or preprogrammed pattern

Includes H152KP combination joystick/keyboard/LCD display and H128PNU4 controller with RS232 interface
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Specifications

Stock Number1666
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