karl Suss RC-5 spin coater with Gyrset for max 5in substrates

Includes 2 Manostat peristaltic pumps for photoresist dispense

max 5" diameter substrate or 4"x4" square

CT-60 controller

max 5000 rpm with steps of 10 rpm

substrate thickness up to 3mm

Acceleration 100 to 5000 rpm/sec

See PDF link below for full description