Suss Microtec Delta 80 Gyrset phtoresist coater with two dispense pumps

Delta 80+ photoresist coater

Gyrset closed cover coating technology

Wafer size up to 200mm

2 Wafertec photo resist pumps

solvent cabinet (acetone)

Fully electronic dispense arm with programmable speed, time, acceleration

2 resist dispense lines

Resist nozzle auto clean option

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