Yield Engineering (YES) model 3TA HMDS vapor prime oven

Interior chamber: 12"w x 13.25"d x 12"h 

(2) PID Temperature Controllers

25-200ºC

PLD Logic Controller with Touchscreen Display

Granville-Phillips Digital Vacuum Gauge

Side Mounted, High-Capacity Syphon-Fill HMDS Vessel with Vacuum Gauge Mounted on Vessel

Vacuum and Pressure Interlocks Ensure Process Integrity and Nitrogen Pressure Control

Overtemp Protection Heater Shut-Off

Preheated Nitrogen to bring wafers rapidly to Operational Temperature

Multi-Program Capability

Chamber Material: Electro-Chemically Polished 316L Stainless Steel

120v, 1ph, 50/60hz, 14amp

Included: 7CFM vacuum pump, hydrocarbon

See PDF link below for complete specifications