CEE 200FX Coater for substrates up to 450mm or 14in x14in square with cabinet

Configured for 300mm wafers

PLC control 0-23,000RPM with 300mm substrate

Touch screen interface with USB/Ethernet port

Stand alone cabinet configuration

Spare parts available including motor drive and display

Note: CEE 200FX uses PLC control vs. the CEE 300X which has a Windows interface.

Both have the same capabilities otherwise.

Optional: Integrated Designs IDS400 photoresist pump add $2500.