Nikon 200mm wafer inspection station with NWL200-TMB (2012) wafer loader and Eclipse L200 microscope

Nikon 200mm automated inspection system with Eclipse L200 microscope and Nikon NWL200-TMB wafer loader

Topside, Macro, backside inspection modes

May be configured for 150mm or 200mm wafers.  Includes shuttle stage and alignment plate

Will handle wafers down to 300um thickness or 200um with conversion kit 

See PDF link below for NWL-200TMB wafer loader specifications