Karl Suss PA200 semiautomatic prober with temperature controlled 200mm chuck and dark chamber

Suss Microtech PA200 semiautomatic prober

Dark chamber

Motorized microscope mount with 50mm (2") XY travel and pneumatic lift

Mitutoyo FS-60 microscope with Plan APO 2/10/20/50x objectives

DC servo driven wafer stage with linear encoders

Rigid platten with vacuum manifold

Temperature controlled 200mm vacuum wafer chuck 

Temptronic controller and TPO-3000A cooling unit