| Resolution(pulse)micro step | 0.05micrometer(1/20) |
| Travel distance[mm] | 100 |
| Size of stage face[mm] | 120×160 |
| Feed screw[Ball screw] | phi 8lead 1 |
| Guide | Crossed roller guide |
| Material | Aluminum |
| Surface finishing | Black alumite |
| Weight[kg] | 3.1 |
| Resolution(pulse)micro step | 1micrometer/0.5micrometer |
| MAXspeed[mm/sec] | 10 |
| Positioning accuracy for one direction | 15micrometer |
| Repeated positioning accuracy | +-0.3micrometer |
| Load capacity | 20kgf196N |
| Moment rigidity［″/N・cm］ | Pitching 0.013/Yawing 0.010/Rolling 0.01 |
| Lost motion( or less) | 1micrometer |
| Backlash( or less) | 0.5micrometer |
| Degree of parallelization( or less) | 30micrometer |
| Degree of parallelization( or less) | 15micrometer |
| Pitching/Yawing | 20″/25″ |
| Limit sensor | installed |
| Origin sensor | installed |
| Proximity origin sensor | installed |
