Yield Engineering Dual Function YES-58D HMDS and image reversal oven with Alcatel SD2010 pump and cabinet

The Yield Engineering Systems (YES) YES-58D is a dual-function vacuum oven designed for HMDS vapor priming and image reversal, often used in semiconductor photolithography processes. It is known for its ability to handle up to 300mm wafers and features a stainless steel chamber. 

Key Specifications & Features

• Functions: Dual-function (HMDS Vapor Prime and Image Reversal).
• Chamber Dimensions: 16” x 16” x 16” (or 18" deep in some configurations).
• Wafer Capability: Up to 300mm wafers (with removable shelf).
• Temperature Range: Up to 200°C.
• Temperature Uniformity: Approximately 5°C during dwell (under specific conditions).
• Heating Elements: 8 heaters (200 Watt each).
• Image Reversal Process: Utilizes 
•  (ammonia) gas at 500 Torr.
• stainless steel cabinet holds: Alcatel SD2010 vacuum pump, ammonia source, piping and regulator

Common Applications

• HMDS Prime: Improves photoresist adhesion to wafers.
• Image Reversal: Used for lifting off photoresist, making positive resist act as a negative.
• Vacuum Bake: Used to remove moisture.