SUSS PM5 manual prober with Mitutoyo FS60 microscope and (2) PH500 micropositioners, 150mm vacuum chuck

6" vacuum chuck

Pair PH500 micropositioners with vacuum base

Optional Kinetic Vibration isolation table add $1600.

Optional Infinity 2-3 3.3mp  color camera with monitor, PC, and software Add $2300.

Mitutoyo FS60 stereo zoom with  APO 10x/20x objectives

MOTIC fiber optic illuminator

Vacuum manifold

The SUSS PM5 is a manual analytical probe station designed for precision electrical analysis (DC and HF) of wafers and substrates up to 150 mm (6 inches) in diameter. It is widely used for failure analysis, MEMS testing, and device characterization. 

Core Technical Specifications

• Wafer/Substrate Size: Up to 150 mm (6") diameter.
• Stage Movement (X, Y): 155 x 155 mm range with 5 µm resolution.
• Stage Planarity: <10 µm over a 6" area.
• Z-Axis Control: 10 mm height adjustment range with a 3 mm contact/separation stroke.
• Theta Travel: 360° standard rotation; optional fine adjustment of ±10°. 

Chuck & Platen Details

• Chuck Type: Standard 6" vacuum chuck, often stainless steel.
• Chuck Planarity: 3 µm.
• Platen Adjustment: Up to 40 mm height adjustment for versatile setup.
• Probe Head Capacity: Can accommodate up to 20 SUSS ProbeHeads (PH100) or multiple vacuum-based micropositioners.
• Contact Repeatability: 1 µm. 
• Physical & Utility Requirements

• Dimensions: Approximately 490 x 490 x 480 mm .
• Weight: Approximately 60–73 kg (132–160 lbs) depending on configuration.
• Vacuum Requirements: -0.8 bar.
• Compressed Air: 4 bar. 

Standard Configuration Features

• Microscope Support: A rigid metal bridge spans the base to isolate the microscope from stage vibrations.
• Optics: Typically equipped with stereo zoom or compound microscopes (e.g., Olympus SZ40 or Mitutoyo FS60) with extra-long working distance objectives.
• Loading: Features a pull-out stage for ergonomic and quick changing of the Device Under Test (DUT).