August Technologies AXI-930 Macro Defect inspection tool with dual load ports

Macro defect inspection systems

Defect sensitivity to 0.5 microns (user adjustable)

Inspection camera: 1.8 MB monochrome CCD Review camera: 3 CCD color

Illumination: High speed strobe

Continuous scan technology

Vibration isolated stage

Operating system: Windows

Automatic data collecting & reporting

Modular design for enhanced upgradability

Turret assembly

Standard 2D Defect & metrology verification standard NIST CE

Multi-pass High speed focus map sensor: Point sensor

Standard light tower 

Wafer loadport (2)

GENMARK (150-300mm)

Single OCR Ionizer

UltraPort

Standard light tower: R/Y/G.