Nikon Confocal NEXIV VMZ-K6555 with 650 x 550mm XY travel, Type H 15x

Similar to the current Confocal NEXIV VMR-K3040ZC, the new Confocal NEXIV VMZ-K6555 continues to allow for both 2D measurements on brightfield images with a CNC 15x zooming optics and 3D measurements on confocal images. Furthermore, TTL scanning laser automatic focus and Video image automatic focus functionalities have been added to the new Confocal NEXIV VMZ-K6555 for more flexibility.

Features

1. Longer XY stage strokes

650x550 mm strokes are realized for the inspection of 510 mm square interposer substrates or 500 mm diameter probe cards or any application requiring large XY stage travel.

2. High magnification lens 15x and high magnification CF optical head (Type H)

The dedicated 30x objective lens and high magnification CF optical head have been newly designed to produce higher resolution for the measurements of smaller line width and spacing.

3. TTL scanning laser AF and vision AF now available on the VMZ-K6555

The renowned NEXIV automatic focusing capabilities have now been added to the new Confocal NEXIV VMZ-K6555 for the ability to easily accomplish much more complex measuring applications.

4. Higher resolution power and higher traveling accuracy on the Z axis

Z axis travel resolution is now 0.01 µm and traveling accuracy on the Z axis is now 1+L/150 µm1+L/1000 µm, regardless of the type of confocal optical head.(Revised on March 24, 2009)

5. LED light source

For episcopic and diascopic lighting, the halogen light source has been replaced with LED light allowing for longer life and brighter images.