Cascade Form Factor S300 Semiautomatic prober with ERS 300mm temperature controlled wafer chuck, eVue digital microscope, and Nucleus software

300mm semiautomatic prober 

Precision linear-motors/ air bearing stage

Sub-micron stepping with auto XYZ and theta correction

eVue 3 digital imaging system with enhanced optical visualization and remote control

Microchamber with EMI shielding, light attenuation, and air-purge management

DUT sizes supported; shards or wafers from 50mm to 300mm

Internal pneumatic vibration dampening

Nucleus ver. 4.1 software running on Windows 7 PC

sn 729240602

ERS 300mm air cooled thermal chuck with Attoguard and -60 to +300C range