2015 Yield Engineering 450 PB12-2P-CP Polyimide bake oven for maximum 300mm wafers

sn 89416

EXCEPTIONAL CONDITION FROM LOCAL IBM ALMADEN RESEARCH LAB

Manufacture date 2015

Cooling fan 2000 scfm included

Vacuum pump Edwards nXDS35i scroll pump REBUILT WITH NEW TIP SEALS included (or Sogevac single stage SV40)

Stainless Support table with casters included

SPECIFICATIONS

Clean Room Compatibility Class 10

Chamber Cleanliness Class 1

Wafer Size Up to 300mm

Capacity Up to 50 12” wafers/batch (two 25 wafer cassettes)

Operation Temperature Ambient to 450°C

N2 Flow Rate 1 SCFM

Nitrogen Consumption 15-25 liters/min.

Interior Chamber Dimensions 54.34 cm barrel (ID) x 104.06 cm (D) — (21” x 40.97”)

Chamber Process Area 37.592 cm (W) x 56.64 cm (D) x 36.07 cm (H) — (14.8” x 22.3” x 14.2”)

Overall System Dimensions 84.48 cm (W) x 174.57 cm (D) x 138.7 cm (H) — (35.23” x 68.73” x 54.61”)

Control Console Dimensions 59.44 cm (W) x 96.01 cm (D) x 23.62 cm (H) — (23.4” x 37.8” x 9.3”)

Chamber Material 316L stainless steel

Process Gas Inputs 1 standard, up to 3 optional Mass Flow Controllers Optional – up to 3 for gas mixing

Laminar Flow Filter 100 micron Mott™ plate filter

Cleanliness Particle reduction in most applications

SOFTWARE

Number of Recipes 8 temperature profiles

Number of Steps for Each Recipe 16 program steps Range of Segment Time 0-99 hours Resolution of Timer Setting 1 minutes

PERFORMANCE

Temperature Uniformity ± 7°C during dwell after all temperature points have stabilized for 15 minutes

Average Heat-Up Rate (150°C - 450°C) 3.5°C/min.

Empty Chamber Load Dependent Average Cool-Down Rate (450°C - 150°C) 3.0°C/min.

Empty Chamber Load Dependent

Oxygen Concentration 10 ppm over background

Power Requirements 208V, 40 amps, 50/60 Hz, 3 phase

Tool Weight (approx.) 894 lbs (406 kgs)

# OF CASSETTES THAT FIT INSIDE THE LAMINAR FLOW ZONE

2 inch wafers 25 cassettes

3 inch wafers 15 cassettes

100 mm wafers 10 cassettes

125 mm wafers 10 cassettes

150 mm wafers 10 cassettes

200 mm wafers 3 cassettes

300 mm wafers 2 cassettes