Yield Engineering 450PB6-2P REFURBISHED High temperature vacuum oven for polyimide, photoresist and epoxy curing (2014)

Yield Engineering 450PB6-2P REFURBISHED High temperature vacuum oven for polyimide, photoresist and epoxy curing (2014)

$49,500 (USD)

Description

-

 Max Capacity: 2 cassettes of 150mm Wafers  

- Temperature Range: 25C to 450C

- Multiple Program Temperature Controller

- Power: 220V, 25 Amps, 50/60 Hz 3 phase +1G-Exhaust fan included

_Leybold Sogevac SV40 vacuum pump or equivalent-serial no. 89122Date of Manufacture 2014Option: Install Systech 913 Oxygen Analyzer $8500.


  • Polyimide and BCB curing requires a low oxygen environment (typically less than 20 ppm) to prevent discoloration (browning) and ensure optimal film transparency.
  • Oxygen contamination can lead to defects and impact the quality and performance of the cured polyimide layer.
  • YES's PB-Series ovens achieve low oxygen levels through a low-pressure vacuum cure process with a gentle, preheated laminar nitrogen flow.

  • Oxygen analyzer functionality
  • The oxygen analyzer monitors the oxygen concentration within the oven chamber.
  • If oxygen levels exceed the set point, the analyzer triggers the nitrogen purge to restore the inert atmosphere.
  • An oxygen analyzer and control system helps minimize nitrogen usage while ensuring consistent and repeatable curing processes.

  • Benefits
  • Provides real-time feedback on oxygen levels during the curing process.
  • Helps maintain optimal curing conditions for high-quality polyimide films.
  • Contributes to improved yield and reduced processing defects.

  • Specifications

    Stock Number5178
    ManufacturerYield Engineering
    Model450PB6-2P-CP
    Year2014
    Serial Number89122
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