Ebara A30W 125cfm Dry Pump- Rebuilt- Tested to ultimate pressure <2mtorr

Rebuilt Ebara A30W dry pump with blower, 125cfm, NW50 inlet, NW40 exhaust, 200-220v

tested to <2mtorr

exhaust filter

EBARA A30W Multi-Stage Dry Vacuum Pump - REBUILT

Technical Characteristics

Complete pump safeguard system

High pump operating temperature preventing condensation

Low noise and low vibration

Corrosion resistant materials-stainless steel coolers, water circuits

High reliability even for harsh processes

Efficient interstage coolers for LPCVD nitride process

Canned motor

Low service requirements

Control panel for monitoring operating conditions

Customer Benefits

Very low nitrogen consumption for purging

Clean room compatible

Low service requirements

Compact size and small footprint

Pumping speed (N2) 50/60 Hz	3,000 / 3,600 l/min
Pumping speed (N2) 50/60 Hz	180 / 216 m3/h
Ultimate pressure 50/60 Hz	4 x 10-3 / 3 x 10-3 mbar
Ultimate pressure 50/60 Hz	0.4 / 0.3 Pa
Water consumption	3.5 l/min
Nitrogen consumption	10-13 slm
Nitrogen consumption	17-22 Pa m3/sec
Voltages ranges	200-220 V
Motor power, installed	1.5+2.2 kW
Weight, approx.	330 kg
Dimensions	895 x 400 x 485 mm
Inlet flange size	DN 50 KF
Outlet flange size	DN 40 KF