Ebara A10S 42.2cfm Dry Pump, ultimate vacuum 30mtorr

Ebara A10S 42.2cfm Dry Pump, ultimate vacuum 30mtorr

$4,900 (USD)

Description

Description:
This A10S is a Multi Stage Dry Pump part of the second generation of dry pumping solutions introduced by Ebara.

It has a compact design and includes various sensors and controls reporting to the handheld LCD display or to a parent vacuum chamber to enhance the operation.

It utilizes a water cooled canned motor driving multi stage tri-lobe roots pumping technology.

The A10S is an excellent choice for load lock, transfer chambers and other relatively benign applications that can benefit from a dry pump

Pumping Speed Nitrogen 42.2 CFM (1,199.6 l/m)

Ultimate Pressure 3.00E-2 torr (30mtorr)

Inlet Flange KF 40.0 mm (1.575 in)

Exhaust Flange KF 40.0 mm (1.575 in)

Duty--Service Corrosive

Motor : 3 HP Rotational Speed 3,440 RPM

Oil Type Fomblin TM


Specifications

Stock Number1431
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