Novascan PSDP-UV1216T Digital Benchtop UV ozone cleaner with heated 12x16 sample stage and OES-1000D ozone elimination system

The PSDP-UVT Pro series combines benefits of the PSD and PSDP UV systems with the enhancement of a PID controlled heated sample stage allowing for Thermally assisted UV treament. The PSDP-UVT Thermal Assisted systems are usefully for a wide variety of applications such as thermal enhanced UV curing, UV patterning, wafer cleaning, thermal enhanced photo resist stripping, thermal enhanced PDMS bonding, fabrication and microfluidics, AFM probe cleaning, thermal enhanced ozone etching, etc. The PSDP-UVT systems are commonly used in the electronics, semiconductor, optics, material science, biology, chemistry, pharmaceutical, bio sensor and nanotechnology industries.

The addition of a Thermal assisted UV to the PSDP-UVT Series enhances the cleaning, stripping, oxidation, chemical reactions, and catalytic processes of many applications.

PSDP-UV1216T Pro system has a 12x16" heated sample stage capable of handling multiple wafers or LCD panels.

Features