Nikon Confocal NEXIV VMZ-K6555 with 650 x 550mm XY travel, Type H 15x
Nikon Confocal NEXIV VMZ-K6555 with 650 x 550mm XY travel, Type H 15x
$195,000 (USD)
Description
Similar to the current Confocal NEXIV VMR-K3040ZC, the new Confocal NEXIV VMZ-K6555 continues to allow for both 2D measurements on brightfield images with a CNC 15x zooming optics and 3D measurements on confocal images. Furthermore, TTL scanning laser automatic focus and Video image automatic focus functionalities have been added to the new Confocal NEXIV VMZ-K6555 for more flexibility.
Features
1. Longer XY stage strokes
650x550 mm strokes are realized for the inspection of 510 mm square interposer substrates or 500 mm diameter probe cards or any application requiring large XY stage travel.
2. High magnification lens 15x and high magnification CF optical head (Type H)
The dedicated 30x objective lens and high magnification CF optical head have been newly designed to produce higher resolution for the measurements of smaller line width and spacing.
3. TTL scanning laser AF and vision AF now available on the VMZ-K6555
The renowned NEXIV automatic focusing capabilities have now been added to the new Confocal NEXIV VMZ-K6555 for the ability to easily accomplish much more complex measuring applications.
4. Higher resolution power and higher traveling accuracy on the Z axis
Z axis travel resolution is now 0.01 µm and traveling accuracy on the Z axis is now 1+L/150 µm1+L/1000 µm, regardless of the type of confocal optical head.
(Revised on March 24, 2009)
5. LED light source
For episcopic and diascopic lighting, the halogen light source has been replaced with LED light allowing for longer life and brighter images.
Specifications
| Model | VMZ-K6555 | |||
|---|---|---|---|---|
| Head Type | Type H | Type S | ||
| Magnifications | 30x | 7.5x | 3x | 1.5x |
| W.D. | 5 mm | 5 mm | 24 mm | 24 mm |
| Confocal Optics for Area Height Measurement | ||||
| Maximum scanning range | 1 mm | 1 mm | 1 mm | 1 mm |
| Field of view | 0.4x0.3 mm | 1.6x1.2 mm | 4x3 mm | 8x6 mm |
| Z measurement repeatability (2σ) | 0.2 µm | 0.25 µm | 0.35 µm | 0.6 µm |
| Z axis minimum read out | 0.01 µm | |||
| Height measurement speed | 1.5 sec./FOV | |||
| Brightfield Optics for 2D Measurement | ||||
| Zooming method | Motorized 5-step zoom (1-15x) | |||
| Field of view | 0.39x 0.3-0.049x 0.037 mm | 1.6x 1.2-0.11x 0.08 mm | 4x3-0.27x 0.2 mm | 8x6-0.53x 0.4 mm |
| Illumination | Dia/Epi | Dia/Epi/Ring Light | ||
| Light source | White LED | |||
| Auto focus | TTL Laser AF/Vision AF | |||
| Main Body | ||||
| Stroke (X x Y x Z) | 650x550x150 mm | |||
| Guaranteed loading capacity | 30 kg | |||
| XY traveling accuracy U1X/Y | 1.5+2.5L/1000 µm | |||
| U2XY | 2.5+2.5L/1000 µm | |||
| Z axis | (begin delete)1+L/150 µm(end delete) 1+L/1000 µm* | |||
| Main unit weight | (begin delete)Approx. 800 kg(end delete) Approx. 850 kg* | |||
| Power source/ consumption | AC 100-240 V ± 10 % 50/60 Hz / 10 A - 5 A | |||
| Operating conditions | Temperature: 20 °C ± 0.5 K Humidity: 70 % or less | |||
| Acquired standard | CE marking (low voltage/EMC/Laser) |
Specifications
| Stock Number | 4668 |
| Sort | 0 |